发表论文 [1] ChunRong Pan, Yan Qiao, MengChu Zhou and NaiQi Wu,Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges, IEEE Transaction on Automation Science and Engineering, 2018, 15(2):586-601. [2] Jipeng Wang, Chunrong Pan, Hesuan Hu, Liang Li, and Yuan Zhou, A Cyclic Scheduling Approach to Single-Arm Cluster Tools with Multiple Wafer Types and Residency Time Constraints, IEEE Transactions on Automation Science and Engineering, 2019, 16(3):1373-1386. [3] Chunrong Pan, Kun Zhao, and Fei Zhang, Scheduling and Optimization of mixed-processing with multi-variety wafers in dual-armed cluster tools, Journal of the Chinese Institute of Engineers. 2018, 41(6): 463-472 [4] ChunRong Pan, Yan Qiao, and NaiQi Wu,MengChu Zhou, A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation, IEEE Transactions on Systems, Man, and Cybernetics, systems, 2015, 45(5):805-818. [5] Pan, C. R.. ; Qiao, Y. ; Zhou, M.C. ; Wu, N.Q., Scheduling and Analysis of Start-up Transient Processes for Dual-Armed Cluster Tools with Wafer Revisiting, IEEE Transactions on Semiconductor Manufacturing, 2015, 28(2):160-170. [6] 潘春荣,付锦超,基于Petri网的可重入双臂组合设备故障响应策略,计算机集成制造系统,2019, 25(12): 3235-3246. [7] 潘春荣,熊文清,稳态调度下单臂组合设备时间延迟分析与优化,控制理论与应用,2019, 36(10): 1719-1729. 知识产权 [1] 一种多品种晶圆混合加工的组合设备稳态调度方法, ZL 2016108882841.1,发明专利; [2] 果冻机,ZL 2017 10696509.8,发明专利; [3] 一种半自动化桶装水的装载装置,ZL 2013 1 0469540.X,发明专利 |